FOTOPUR^®

FOTOPUR^® Series - Our Precise Recipe for Photolithography Ancillaries

Photolithography is a crucial step in electronics manufacturing. Its sophistication demands the utmost in high purity chemicals. The selection of suitable surfactants, chelating and anti-corrosion agents is therefore essential. With FOTOPUR^®, we provide the perfect solution for this crucial step in semiconductor manufacturing:

BEOL and FEOL application:

•  FOTOPUR^® C Series for defect reduction rinse solution
• FOTOPUR^® R Series for post etch/post ash/post implant residue removers

Bumping and 3D TSV application:

• FOTOPUR^® D Series for photoresist/polyimide developer
• FOTOPUR^® S Series for photoresist/polyimide stripper