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FOTOPUR®

FOTOPUR® Series - Our Precise Recipe for Photolithography Ancillaries

Photolithography is a crucial step in electronics manufacturing. Its sophistication demands the utmost in high purity chemicals. The selection of suitable surfactants, chelating and anti-corrosion agents is therefore essential. With FOTOPUR®, we provide the perfect solution for this crucial step in semiconductor manufacturing:

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BEOL and FEOL application:

  •  FOTOPUR® C Series for defect reduction rinse solution
  • FOTOPUR® R Series for post etch/post ash/post implant residue removers

Bumping and 3D TSV application:

  • FOTOPUR® D Series for photoresist/polyimide developer
  • FOTOPUR® S Series for photoresist/polyimide stripper